MIL-STD-977
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MIL-STD-977, MILITARY STANDARD, TEST METHODS AND PROCEDURES FOR MICROCIRCUIT LINE CERTIFICATION (25 JAN 1982)., This standard sets forth test methods and procedures applicable to the control of materials and processes used in the manufacture of microcircuits. This standard is intended to cover only silicon wafer fabrication. The tests listed and the various procedures may or may not apply to other materials. These methods and procedures are intended to complement those of MIL-STD-883 and, therefore, cover the operations required during wafer processing and inspection, starting with the raw material and ending with the finished wafer.
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